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    Abstract: Processes for forming nitride films in integrated circuit manufacture are accomplished by chemical vapor deposition using nitrogen fluoride (NF3) as a nitrogen-bearing

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  • WO1998023389A1

    Processesforformingnitridefilmsinintegratedcircuitmanufactureareaccomplishedbychemicalvapordepositionusingnitrogenfluoride(NF3)asanitrogen-bearinggasprovidingnitrogento

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